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Kokusai Semiconductor Equipment Corp.

2 Process Water Cooling Systems

  • Mueller Accutherm S.S. Plate Heat Exchanger
  • Mueller Accutherm S.S. Plate Heat Exchanger
  • Marley Water Cooling Tower

3 Water Filtration Systems

  • Fluid Solutions R.O. Water Filtration System
  • (2) DI Water Polishing Systems
  • Aqua Fine UV Units, Tank, Pump, Controls

Welders

  • (2) Cajon 100DR Auto Tube Welders
  • Process Lab
  • Poly Flow H233 Quartzware Cleaning System
  • (2) Universal Plastics 8’ Wafer Cleaning Stations
  • (3) Verteq Superclean 1600 Spin Dryers
  • Nikon Optiphot 88 Microscope, HFX-DX Head
  • U.S. Filter Water Filter System w/Aqua Fine UV Unit

Metrology Lab

  • Tencor SFS 6200 Surf Scan Wafer Surface Analyzer
  • Rudolph FE3 Focus Ellipsometer
  • Prometrix Spectra Map SM-300 Film Thickness
  • Tencor RS75 Resistivity Measurer